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一種石墨烯納晶碳膜接觸電特性的測試裝置及方法

成果領域:

推廣方式:

成果歸屬企業(yè): 深圳大學

成果鑒定時間:

成果介紹

本發(fā)明公開一種柔性溫度傳感器及其制備方法。所述柔性溫度傳感器包括：柔性襯底、位于所述柔性襯底上的電極，所述電極包括源極、漏極和柵極，所述源極和漏極構成叉指型電極，還包括復合薄膜，所述復合薄膜由半導體層和柵介電層構成，所述半導體層覆蓋于所述叉指型電極的溝道上，所述柵介電層覆蓋于所述半導體層與所述柵極上，所述半導體層與所述柵介電層形成互滲結構。本發(fā)明半導體層與柵介電層形成互滲結構，從而形成柔性的復合薄膜，實現全柔性的傳感器結構。半導體層與柵介電層部分形成的互滲結構，將大大提高兩者的接觸面積，從而增加柵介電層的平板電容大小，利用平板電容隨溫度變化并結合晶體管放大作用，最終實現高靈敏度的溫度探測。

成果應用案例介紹

測量實驗>傳感器>柔性溫度傳感器

聯(lián)系方式

電話/微信: 13822630888

相關成果

免責聲明 / 網站地圖 / 平臺簡介 / 友情鏈接

郵箱：zeccea@qq.com QQ群：318441538 客服電話：0758-2721389 秘書處電話/微信：13822630888

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[ CACHE ] INIT File
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[ BEHAVIOR ] Run app\common\behavior\Common @app_init [ RunTime:0.000226s ]
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[ BEHAVIOR ] Run app\common\behavior\Common @app_dispatch [ RunTime:0.000010s ]
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[ BEHAVIOR ] Run app\common\behavior\Common @module_init [ RunTime:0.000700s ]
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[ BEHAVIOR ] Run \addons\wxfollowlogin\Wxfollowlogin @view_filter [ RunTime:0.000041s ]

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